LED wafer UV irradiator
Curing applications for wafer dicing tape, featuring stable long lifespan with UV-LED adoption.
Stable long lifespan with LED adoption. Compatible with 6-inch and 8-inch wafers. Manufacturing possible for 12-inch wafers. Interchangeable light sources (365, 385, 395, 405 nm, etc.). Dimming possible from 0 to 100%. Reduction of oxygen inhibition during UV curing achieved by adopting a nitrogen replacement (N2 purge) mechanism.
- Company:アイテックシステム
- Price:1 million yen-5 million yen